The pyramid-structured silicon substrate was successfully fabricated by a chemical corrosion method with an average thickness of about 1 - 3 μm with the optimal parameters such as corrosion temperature of 70oC, corrosion time of 5 min, concentration KOH of 3 M and isopropyl alcohol concentration of 1 M. After that, the silver nanoparticles layer (thickness 20 nm) was coated on the silicon substrate by a sputtering method to enhance the SERS signal. The results proved that the Pyramid/nano Ag structure silicon substrate showed the enhancement effect of Raman signal, and Rhodamine 6G pigment in food at low concentration (10-6 M) was detected and the enhancement factor was 9.7 × 102.
Ag@PSi, PSi, Raman, SERS, Silic substrate
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